Label Number | Parameter | Command/Monitor> |
---|---|---|

Sputter Ion Source | ||

1a | airflow, Cs boiler | amps, volts, deg.C |

2a | ionizer | amps, volts |

3a | suppressor | KV, mA |

4a | cone position | |

5a | bias | volts |

6a | gridded lens | KV |

7a | steerer | volts |

Duoplasmatron Ion Source | ||

1b | filament | amps, volts |

2b | arc | amps |

3b | magnet | amps |

4b | probe | KV, amps |

5b | extraction | KV, mA |

6b | focus | KV, mA |

7b | attachment | KV, mA |

8b | heater | amps, deg.C |

9b | source gas, adder gas | flow rates |

Ion Injection Section | ||

10 | inflection | amps, Kgauss |

11 | Einzel lens | KV |

12 | LE slit | amps: L,R,U,D |

13 | LE BPM | gain: hi/lo, on/off, amps |

14 | LE cup | in/out, amps |

15 | LE steerers | (1Y,1X,2Y,2X) volts |

16 | gridded lens | KV, mA |

High Voltage Generator | ||

17 | LE drive motor | KW, start/off |

18 | LE column | amps |

19 | LE charge | volts, amps |

20 | stripper gas flow | increase/decrease |

21 | terminal | MV |

22 | corona | amps, in/out, position |

23 | foil | up/down |

24 | terminal steerer | up/down |

25 | HE charge | volts, amps |

26 | HE column | amps |

27 | HE drive motor | KW, start/off |

Beam Analysis Section | ||

28 | HE BPM | gain:hi/lo, on/off, amps |

29 | HE cup | in/out, amps |

30 | HVEC Quad | #1:amps, #2:amps |

31 | HE steerers | (1X,1Y,2X,2Y) volts |

32 | object BPM | gain:hi/lo, on/off, amps |

33 | object slits | amps: L,R,U,D |

34 | analysis magnet | up/down, dial, amps, freq, Kgauss |

35 | image slits | amps: L,R,U,D |

36 | image cup | in/out, amps |

37 | image BPM | gain:hi/lo, on/off, amps |

38 | Quad A | amps, increase/decrease |

39 | Quad B | amps, increase/decrease |

40 | Quad C | amps, increase/decrease |